Semiconductor / Display Production
This technology involves manufacturing equipment
that inspects the shape of Photomasks used in
semiconductor and display production,
and repairs any detected defects.
In the Display Laser Repairs field, we leverage our advanced technical expertise
to offer optimal solutions, including PhotoMask Repair, Photo Mask AOI,
Micro LED Repair, CVD Repair, Inkjet Repair, among others.
Display Photomask
Our technology is focused on producing equipment that examines the shape of Photomasks
used in the display manufacturing process and repairs any flaws that are found.
Display Photomask Repair
Repair for shape and transmission issues
in 8G/10G PhotoMasks
Zap: (T>92%) < 0.5um Precision in shape processing
Binary (T: 0%) Restoration of thin-film quality
and shape
Half Tone (T: 30~70%) Restoration of thin-film quality
and shape
Net Certification of technology (certification number: 0589)
Display Photomask Inspection
UV Light Line Scan Inspection
Transmission & Reflection mode
< 1um Resolution, 2um L&S
Particle Filtering, Pattern Matching, Sub-Pixel
Semiconductor Photomask
This technology is employed to manufacture equipment that inspects the shape of
Photomasks in semiconductor production and fixes any identified defects.
Semiconductor Photomask Repair
Repair and restoration of shape and transmission
for 6~9 inch Photo Masks
Zap: (T>95%) < 0.4um Precision in shape processing
PBinary (T: 0%) Restoration of thin-film quality
and shape
Semiconductor Photomask Inspection
UV LASER Scanning Inspection
Transmission & Reflection mode
200nm Resolution Hight Speed Scan Inspection
Die to Die, DB to Die
FMM
(Fine Metal Mask)
This involves creating equipment that inspects and repairs defects in the shape of
FMMs utilized in the OLED deposition process.
FMM Repair
Repair of Fine Metal Mask shape and removal of foreign
material flaws
LASER Ablation / Gel Stick Application
FMM Inspection
Fine Metal Mask AOI
3um Resolution
Mask Shape, Burr, Particle
Option : CD Inspection, 3D Inspection